Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography.
| Autor: | W. Li, Patel, D., Menoni, C. S., Stein, A., W. Chao, Anderson, E., Marconi, M. C. |
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| Zdroj: | Proceedings of SPIE; Nov2014, p1-5, 5p |
| Databáze: | Complementary Index |
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