2DEG electrodes for piezoelectric transduction of AlGaN/GaN MEMS resonators.

Autor: Popa, Laura C., Weinstein, Dana
Zdroj: 2013 Joint European Frequency & Time Forum & International Frequency Control Symposium (EFTF/IFC); 2013, p922-925, 4p
Abstrakt: A 2D electron gas (2DEG) interdigitated transducer (IDT) in Gallium Nitride (GaN) resonators is introduced and demonstrated. This metal-free transduction does not suffer from the loss mechanisms associated with more commonly used metal electrodes. As a result, this transducer can be used for both the direct interrogation of GaN electromechanical properties and the realization of high Q resonators. A 1.2 GHz bulk acoustic resonator with mechanical Q of 1885 is demonstrated, with frequency quality factor product (f·Q) of 2.3×1012, the highest measured in GaN to date. [ABSTRACT FROM PUBLISHER]
Databáze: Complementary Index