Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone.
| Autor: | Haga, K, Abe, S, Takizawa, Y, Yubuta, K, Shishido, T |
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| Zdroj: | Journal of Physics: Conference Series; 2013, Vol. 417 Issue 1, p012059-012064, 6p |
| Databáze: | Complementary Index |
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