Structural and electrical properties of Ge nanoparticles grown by LPCVD for MOSstructures.
| Autor: | Mederos, M., Mestanza, S. N. M., Doi, I., Diniz, J. A. |
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| Zdroj: | 28th Symposium on Microelectronics Technology & Devices (SBMicro 2013); 2013, p1-4, 4p |
| Databáze: | Complementary Index |
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