Direct Nanoimprinting for Micro- and Nanosystems.
Autor: | Kirchner, Robert, Derix, Jonathan, Nocke, Andreas, Landgraf, René |
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Zdroj: | Bio & Nano Packaging Techniques for Electron Devices; 2012, p209-242, 34p |
Databáze: | Complementary Index |
Externí odkaz: |