Ion implantation in semiconductors—Part I: Range distribution theory and experiments.
| Autor: | Gibbons, J.F. |
|---|---|
| Zdroj: | Proceedings of the IEEE; 1968, Vol. 56 Issue 3, p295-319, 25p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Gibbons, J.F. |
|---|---|
| Zdroj: | Proceedings of the IEEE; 1968, Vol. 56 Issue 3, p295-319, 25p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|