Fabrication of submicron high-aspect-ratio GaAs actuators.
| Autor: | Zhang, Z.L., MacDonald, N.C. |
|---|---|
| Zdroj: | Journal of Microelectromechanical Systems; 1993, Vol. 2 Issue 2, p66-73, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Zhang, Z.L., MacDonald, N.C. |
|---|---|
| Zdroj: | Journal of Microelectromechanical Systems; 1993, Vol. 2 Issue 2, p66-73, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|