Frequency effects in capacitively coupled radio-frequency glow discharges: a comparison between a 2-D fluid model and experiments.
| Autor: | Goedheer, W.J., Meijer, P.M., Bezemer, J., Diederick, J., Passchier, J.D.P., van Sark, W.G.J.H.M. |
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| Zdroj: | IEEE Transactions on Plasma Science; 1995, Vol. 23 Issue 4, p644-649, 6p |
| Databáze: | Complementary Index |
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