A generic cell controller for the automated VLSI manufacturing facility.
| Autor: | Moyne, J.R., McAfee, L.C. |
|---|---|
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing; 1992, Vol. 5 Issue 2, p77-87, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Moyne, J.R., McAfee, L.C. |
|---|---|
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing; 1992, Vol. 5 Issue 2, p77-87, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|