Electrical properties of composite gate oxides formed by rapid thermal processing.
| Autor: | Misra, V., Henson, W.K., Vogel, E.M., Hames, G.A., McLarty, P.K., Hauser, J.R., Wortman, J.J. |
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| Zdroj: | IEEE Transactions on Electron Devices; 1996, Vol. 43 Issue 4, p636-646, 11p |
| Databáze: | Complementary Index |
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