Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history.
| Autor: | Flinn, P.A., Gardner, D.S., Nix, W.D. |
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| Zdroj: | IEEE Transactions on Electron Devices; 1987, Vol. 34 Issue 3, p689-699, 11p |
| Databáze: | Complementary Index |
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