A diagnostic pattern for GaAs FET material development and process monitoring.
| Autor: | Immorlica, A.A., Decker, D.R., Hill, W.A. |
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| Zdroj: | IEEE Transactions on Electron Devices; 1980, Vol. 27 Issue 12, p2285-2291, 7p |
| Databáze: | Complementary Index |
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