Stress effects of water sorption in cure baked photoresist underlayers on the magnetic easy axis of Permalloy film overlayers.

Autor: Kasiraj, P., Moylan, C.R., Fontana, R.E.
Zdroj: IEEE Transactions on Magnetics; 1994, Vol. 30 Issue 6, p3888-3890, 3p
Databáze: Complementary Index