Stress effects of water sorption in cure baked photoresist underlayers on the magnetic easy axis of Permalloy film overlayers.
Autor: | Kasiraj, P., Moylan, C.R., Fontana, R.E. |
---|---|
Zdroj: | IEEE Transactions on Magnetics; 1994, Vol. 30 Issue 6, p3888-3890, 3p |
Databáze: | Complementary Index |
Externí odkaz: |