RHEA (resist-hardened etch and anodization) process for fine-geometry Josephson junction fabrication.
| Autor: | Lee, L.P.S., Arambula, E.R., Hanaya, G., Dang, C., Sandell, R., Chan, H. |
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| Zdroj: | IEEE Transactions on Magnetics; 1991, Vol. 27 Issue 2, p3133-3136, 4p |
| Databáze: | Complementary Index |
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