| Autor: |
Talvacchio, J., Forrester, M.G., Hunt, B.D., McCambridge, J.D., Young, R.M., Zhang, X.F., Miller, D.J. |
| Předmět: |
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| Zdroj: |
IEEE Transactions on Applied Superconductivity; 1997, Vol. 7 Issue 2, p2051-2056, 6p |
| Abstrakt: |
We have developed a process for fabrication of HTS single-flux-quantum logic circuits based on edge SNS junctions which requires six epitaxial film layers and six mask levels. The process was successfully applied to fabrication of small-scale circuits (/spl les/10 junctions). This paper examines the materials properties affecting the reproducibility of YBCO-based SNS junctions, the low inductance provided by an integrated YBCO ground plane, and electrical isolation by SrTiO/sub 3/, or Sr/sub 2/AlTaO/sub 6/, ground-plane and junction insulator layers. Some of the critical processing parameters identified by electrical measurements, TEM, SEM, and AFM were control of second-phase precipitates in YBCO, oxygen diffusion, Ar ion-milling parameters, and preparation of surfaces for subsequent high-temperature depositions. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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