Chemical and Discharge Effects in Plasma Etching with Freons and Other Electronegative Gases.
| Autor: | Ibbotson, D., Flamm, D. |
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| Zdroj: | IEEE Transactions on Electrical Insulation; 1982, Vol. EI-17 Issue 2, p163-167, 5p |
| Databáze: | Complementary Index |
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