In-line statistical process control and feedback for VLSI integrated circuit manufacturing.
| Autor: | Scher, G., Eaton, D.H., Fernelius, B.R., Sorensen, J., Akers, J.W. |
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| Zdroj: | IEEE Transactions on Components, Hybrids & Manufacturing Technology; 1990, Vol. 13 Issue 3, p484-489, 6p |
| Databáze: | Complementary Index |
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