Kinetics of copper drift in PECVD dielectrics.
| Autor: | Loke, A.L.S., Changsup Ryu, Yue, C.P., Cho, J.S.H., Wong, S.S. |
|---|---|
| Zdroj: | IEEE Electron Device Letters; 1996, Vol. 17 Issue 12, p549-551, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Loke, A.L.S., Changsup Ryu, Yue, C.P., Cho, J.S.H., Wong, S.S. |
|---|---|
| Zdroj: | IEEE Electron Device Letters; 1996, Vol. 17 Issue 12, p549-551, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|