A new miniaturized surface micromachined tunneling accelerometer.
| Autor: | Kubena, R.L., Atkinson, G.M., Robinson, W.P., Stratton, F.P. |
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| Zdroj: | IEEE Electron Device Letters; 1996, Vol. 17 Issue 6, p306-308, 3p |
| Databáze: | Complementary Index |
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