High-accuracy tuning of planar millimeter-wave circuits by laser photochemical etching.
| Autor: | Ehrlich, D.J., Williams, D.F., Sedlacek, J.H.C., Rothschild, M., Schwarz, S.E. |
|---|---|
| Zdroj: | IEEE Electron Device Letters; 1987, Vol. 8 Issue 3, p110-112, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|