Tin induced a-Si crystallization in thin films of Si-Sn alloys.

Autor: Neimash, V., Poroshin, V., Shepeliavyi, P., Yukhymchuk, V., Melnyk, V., Kuzmich, A., Makara, V., Goushcha, A. O.
Předmět:
Zdroj: Journal of Applied Physics; Dec2013, Vol. 114 Issue 21, p213104, 6p
Abstrakt: Effects of tin doping on crystallization of amorphous silicon were studied using Raman scattering, Auger spectroscopy, scanning electron microscopy, and X-ray fluorescence techniques. Formation of silicon nanocrystals (2-4 nm in size) in the amorphous matrix of Si1-xSnx, obtained by physical vapor deposition of the components in vacuum, was observed at temperatures around 300 °C. The aggregate volume of nanocrystals in the deposited film of Si1-xSnx exceeded 60% of the total film volume and correlated well with the tin content. Formation of structures with ∼80% partial volume of the nanocrystalline phase was also demonstrated. Tin-induced crystallization of amorphous silicon occurred only around the clusters of metallic tin, which suggested the crystallization mechanism involving an interfacial molten Si:Sn layer. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index