Investigation of hydrogen evolution and dangling bonds creation mechanism in amorphous silicon nitride thin films.
| Autor: | Li, T., Kanicki, J., Fitzner, M., Warren, W.L. |
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| Zdroj: | Proceedings of Second International Workshop on Active Matrix Liquid Crystal Displays; 1995, p129-132, 4p |
| Databáze: | Complementary Index |
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