Wafer line productivity optimization in a multi-technology multi-part-number fabricator.
| Autor: | Maynard, D.N., Rosner, R.J., Kerbaugh, M.L., Hamilton, R.A., Bentlage, J.R., Boye, C.A. |
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| Zdroj: | IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop (Cat No98CH36168); 1998, p34-42, 9p |
| Databáze: | Complementary Index |
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