Test structure for the in-plane locations of project features with nanometer-level accuracy traceable to a coordinate measurement system.
| Autor: | Cresswell, M.W., Allen, R.A., Linholm, L.W., Ellenwood, C.H., Penzes, W.B., Teague, E.C. |
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| Zdroj: | ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures; 1993, p255-261, 7p |
| Databáze: | Complementary Index |
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