Micromachined silicon microvalve.
| Autor: | Ohnstein, T., Fukiura, T., Ridley, J., Bonne, U. |
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| Zdroj: | IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines & Robots; 1990, p95-98, 4p |
| Databáze: | Complementary Index |
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