Hydrogen plasma diffusion treatment of layers prepared by plasma nitridation.
| Autor: | Hruby, V., Kadlec, I., Stodola, J. |
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| Zdroj: | IEEE Conference Record - Abstracts 1999 IEEE International Conference on Plasma Science 26th IEEE International Conference (Cat No99CH36297); 1999, p330-330, 1p |
| Databáze: | Complementary Index |
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