Study of hydrogen gettering effects in plasma immersion ion implantation doping experiments.
| Autor: | Linggen Song, Xiangfu Zong, Shu Qin, Chung Chan |
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| Zdroj: | IEEE Conference Record - Abstracts 1996 IEEE International Conference on Plasma Science; 1996, p170-170, 1p |
| Databáze: | Complementary Index |
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