Micromechanical Gas Heat Capacity Sensor.
| Autor: | Frolov, G. A., Grudin, O. M., Katsan, I. I., Lupina, B. I. |
|---|---|
| Zdroj: | ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference; 1996, p215-218, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|