Ultrathin RTP Oxynitride Dielectrics on Planar, Trench and Three Dimensional Structures.
| Autor: | Nguyen, Son V., Nguyen, Tue, Carl, D., Pricer, D., Korejwa, J. W., Dobuzinsky, D. |
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| Zdroj: | ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference; 1995, p251-254, 4p |
| Databáze: | Complementary Index |
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