Electrical Characterization of a Submicron Titanium Silicide Local Interconnect Technology.

Autor: Pitt, M. G., Jonkers, A. G. M., Pomp, H. G., de Werdt, R.
Zdroj: ESSDERC '89: 19th European Solid State Device Research Conference; 1989, p903-906, 4p
Databáze: Complementary Index