Microstructure release and test techniques for high-temperature micro hotplate.

Autor: Grudin, O., Marinescu, R., Landsberger, L., Cheeke, D., Kahrizi, M.
Zdroj: Engineering Solutions for the Next Millennium 1999 IEEE Canadian Conference on Electrical & Computer Engineering (Cat No99TH8411); 1999, Issue 3, p1610-1610, 1p
Databáze: Complementary Index