Novel device isolation technology with selective epitaxial growth.
| Autor: | Endo, N., Tanno, K., Ishitani, A., Kurogi, Y., Tsuya, H. |
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| Zdroj: | 1982 International Electron Devices Meeting; 1982, p241-244, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Endo, N., Tanno, K., Ishitani, A., Kurogi, Y., Tsuya, H. |
|---|---|
| Zdroj: | 1982 International Electron Devices Meeting; 1982, p241-244, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|