A novel high speed electron resist.
| Autor: | Goldberg, G.M., Lavine, J.M., Masters, J.I., Thompson, P.A., Vayman, Z.Y. |
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| Zdroj: | 1979 International Electron Devices Meeting; 1979, p62-64, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Goldberg, G.M., Lavine, J.M., Masters, J.I., Thompson, P.A., Vayman, Z.Y. |
|---|---|
| Zdroj: | 1979 International Electron Devices Meeting; 1979, p62-64, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|