An effective end point detector on oxide CMP by motor current.
| Autor: | Bih-Tiao Lin, Lee, S.-N. |
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| Zdroj: | 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop ASMC 99 Proceedings (Cat No99CH36295); 1999, p295-298, 4p |
| Databáze: | Complementary Index |
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