MEMCAD capacitance calculations for mechanically deformed square diaphragm and beam microstructures.
| Autor: | Johnson, B.P., Kim, S., Senturia, S.D., White, J. |
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| Zdroj: | TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers; 1991, p494-497, 4p |
| Databáze: | Complementary Index |
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