A low voltage micromachined optical switch by stress-induced bending.
| Autor: | Chen, R.T., Nguyen, H., Wu, M.C. |
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| Zdroj: | Technical Digest IEEE International MEMS 99 Conference Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat No99CH36291); 1999, p424-428, 5p |
| Databáze: | Complementary Index |
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