Fabrication of polysilicon plugs for deep-submicron contact-holes.
| Autor: | Drynan, J.M., Ikawa, E., Kikkawa, T. |
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| Zdroj: | Seventh International IEEE Conference on VLSI Multilevel Interconnection; 1990, p441-443, 3p |
| Databáze: | Complementary Index |
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