High Sensitive Internal Film Stress Measurement By An Improved Micromachined Indicator Structure.
| Autor: | Ericson, F., Greek, S., Soderkvist, J., Schweitz, J. |
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| Zdroj: | Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 2, p84-87, 4p |
| Databáze: | Complementary Index |
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