"Membuilder": An Automated 3D Solid Model Construction Program For Microelectromechanical Structures.

Autor: Osterberg, P.M., Senturia, S.D.
Zdroj: Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 2, p21-24, 4p
Databáze: Complementary Index