Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays.
| Autor: | Semancik, S., Cavicchi, R.E., Kreider, K.G., Suehle, J.S., Chaparala, P. |
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| Zdroj: | Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p831-834, 4p |
| Databáze: | Complementary Index |
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