A Miniaturised Fabry Perot AFM Sensor.
| Autor: | Ruf, A., Abraham, M., Lacher, M., Mayr, K., Zetterer, T. |
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| Zdroj: | Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p660-663, 4p |
| Databáze: | Complementary Index |
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