Capacitance Based Tunable Micromechanical Resonators.
| Autor: | Adams, S.G., Bertsch, F.M., Shaw, K.A., Hartwell, P.G., MacDonald, N.C., Moon, F.C. |
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| Zdroj: | Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p438-441, 4p |
| Databáze: | Complementary Index |
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