A novel method to avoid sticking of surface micromachined structures.
| Autor: | Kozlowski, F., Lindmair, N., Scheiter, T., Hierold, C., Lang, W. |
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| Zdroj: | Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p220-223, 4p |
| Databáze: | Complementary Index |
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