Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface Micromachining.
| Autor: | van Drieenhuizen, B.P., Wolffenbuttel, R.F. |
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| Zdroj: | Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p130-133, 4p |
| Databáze: | Complementary Index |
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