Thermal stability of WSi/sub 2/ polycide structures for 1 Gbit DRAMs.
| Autor: | Gambino, J.P., Weybright, M., Faltermeier, J., Domenicucci, A. |
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| Zdroj: | Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat No98EX102); 1998, p259-261, 3p |
| Databáze: | Complementary Index |
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