High performance MIM capacitor for RF BiCMOS/CMOS LSIs.
| Autor: | Yoshitomi, T., Ebuchi, Y., Kimijama, H., Ohguro, T., Morifuji, E., Momose, H.S., Kasai, K., Ishimaru, K., Matsuoka, F., Katsumata, Y., Kinugawa, M., Iwai, H. |
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| Zdroj: | Proceedings of the 1999 Bipolar/BiCMOS Circuits & Technology Meeting (Cat No99CH37024); 1999, p133-136, 4p |
| Databáze: | Complementary Index |
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