Real-time predictive control of semiconductor manufacturing processes using neural networks.
| Autor: | Himmel, C.D., Kim, T.S., Krauss, A., Kamen, E.W., May, G.S. |
|---|---|
| Zdroj: | Proceedings of 1995 American Control Conference - ACC'95; 1995, Issue 2, p1240-1240, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|