The impact of intermetal dielectric layer and high temperature bake test on the reliability of nonvolatile memory devices.

Autor: Sakagami, E., Arai, N., Tsunoda, H., Egawa, H., Yamaguchi, Y., Kamiya, E., Takebuchi, M., Yamada, K., Yoshikawa, K., Mori, S.
Zdroj: Proceedings of 1994 IEEE International Reliability Physics Symposium; 1994, p359-367, 9p
Databáze: Complementary Index