An accurate Monte Carlo binary collision model for BF/sub 2/ implants into (100) single-crystal silicon.
| Autor: | Yang, S.-H., Morris, S.J., Tian, S., Parab, K., Obradovic, B., Morris, M., Tasch, A.F., Snell, C.M. |
|---|---|
| Zdroj: | Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p547-550, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|