Production proven electrostatic platen for medium current implantation.
Autor: | Frutiger, W., Eddy, R., Brown, D.A., Mack, M.E. |
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Zdroj: | Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p346-349, 4p |
Databáze: | Complementary Index |
Externí odkaz: |